The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2026
Filed:
Dec. 02, 2021
Asml Netherlands B.v., Veldhoven, NL;
Sergei Sokolov, Eindhoven, NL;
Simon Reinald Huisman, Eindhoven, NL;
Jin Lian, Eindhoven, NL;
Sebastianus Adrianus Goorden, Eindhoven, NL;
Muhsin Eralp, Bethel, CT (US);
Henricus Petrus Maria Pellemans, Veldhoven, NL;
Justin Lloyd Kreuzer, Trumbull, CT (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
ASML HOLDING N.V., Veldhoven, NL;
Abstract
A metrology system () includes a multi-source radiation system. The multi-source radiation system includes a waveguide device () and the multi-source radiation system is configured to generate one or more beams of radiation. The metrology system () further includes a coherence adjuster () including a multimode waveguide device (). The multimode waveguide device () includes an input configured to receive the one or more beams of radiation from the multi-source radiation system () and an output () configured to output a coherence adjusted beam of radiation for irradiating a target (). The metrology system () further includes an actuator () coupled to the waveguide device () and configured to actuate the waveguide device () so as to change an impingement characteristic of the one or more beams of radiation at the input of the multimode waveguide device ().