The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Jun. 19, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Yang Zhou, Milpitas, CA (US);
Jiajie Cen, San Jose, CA (US);
Zhiyuan Wu, San Jose, CA (US);
Ge Qu, Sunnyvale, CA (US);
Yong Jin Kim, Albany, CA (US);
Zheng Ju, Sunnyvale, CA (US);
Feng Chen, San Jose, CA (US);
Kevin Kashefi, San Ramon, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods of forming devices comprise forming a dielectric material on a substrate, the dielectric layer comprising at least one feature defining a gap including sidewalls and a bottom. The methods include passivating a metal material at a bottom of the gap with an alkyl reactant to form a passivation layer on the metal material, the gap defined by the bottom and sidewalls comprising the dielectric material with having a barrier layer thereon. A metal liner is selectively deposited on the barrier layer on the sidewall over the passivation layer on the bottom.