The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2026

Filed:

Jul. 09, 2024
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Wei-Jen Lai, Keelung, TW;

Wei-Yang Lee, Taipei, TW;

De-Fang Chen, Hsinchu, TW;

Ting-Wen Shih, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/00 (2025.01); H01L 21/02 (2006.01); H10D 30/01 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 64/01 (2025.01);
U.S. Cl.
CPC ...
H10D 30/6713 (2025.01); H01L 21/02252 (2013.01); H01L 21/0259 (2013.01); H10D 30/031 (2025.01); H10D 30/6729 (2025.01); H10D 30/6735 (2025.01); H10D 30/6757 (2025.01); H10D 62/118 (2025.01); H10D 64/01 (2025.01); H10D 64/017 (2025.01); H10D 64/018 (2025.01);
Abstract

A semiconductor structure includes semiconductor layers vertically stacked above a substrate, a gate structure wrapping around each of the semiconductor layers, a gate spacer disposed on sidewalls of the gate structure, a source/drain (S/D) feature abutting the semiconductor layers, and an S/D contact landing on a top surface of the S/D feature. In a cross-sectional view along a lengthwise direction of the semiconductor layers, a topmost point of the top surface of the S/D feature is above a top surface of a topmost one of the semiconductor layers, and a bottommost point of the top surface of the S/D feature is below the top surface of the topmost one of the semiconductor layers.


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