The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2025

Filed:

Mar. 14, 2022
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Leonard P. Guler, Hillsboro, OR (US);

Mauro J. Kobrinsky, Portland, OR (US);

Ehren Mannebach, Tigard, OR (US);

Makram Abd El Qader, Hillsboro, OR (US);

Tahir Ghani, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 64/23 (2025.01); H10D 30/01 (2025.01); H10D 30/62 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 64/01 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/83 (2025.01);
U.S. Cl.
CPC ...
H10D 64/259 (2025.01); H10D 30/6735 (2025.01); H10D 62/121 (2025.01); H10D 84/0149 (2025.01); H10D 84/038 (2025.01); H10D 84/834 (2025.01); H10D 30/014 (2025.01); H10D 30/6219 (2025.01); H10D 64/01 (2025.01);
Abstract

Integrated circuit structures having backside self-aligned penetrating conductive source or drain contacts, and methods of fabricating integrated circuit structures having backside self-aligned penetrating conductive source or drain contacts, are described. For example, an integrated circuit structure includes a sub-fin structure over a vertical stack of horizontal nanowires. An epitaxial source or drain structure is laterally adjacent and coupled to the vertical stack of horizontal nanowires. A conductive source or drain contact is laterally adjacent to the sub-fin structure and extends into the epitaxial source or drain structure. The conductive source or drain contact does not extend around the epitaxial source or drain structure.


Find Patent Forward Citations

Loading…