The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2025

Filed:

Sep. 19, 2022
Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventors:

Tomer Haim Peled, Ness-Ziona, IL;

Bar Dubovski, Beit Hashmonay, IL;

Noam Tal, Kiryat Ono, IL;

Bobin Mathew Skaria, Bangalore, IN;

Boris Levant, Rehovot, IL;

Tal Frank, Tel Aviv, IL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); G06F 18/214 (2023.01); G06N 20/00 (2019.01); G06T 7/10 (2017.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G06F 18/214 (2023.01); G06N 20/00 (2019.01);
Abstract

There is provided a system and method for examining a semiconductor specimen. The method includes obtaining a runtime image of the specimen, and providing the runtime image as an input to an end-to-end (E2E) learning model to process, thereby obtaining, as an output of the E2E learning model, runtime measurement data specific for a metrology application. The E2E learning model is previously trained for the metrology application using a training set comprising a plurality of training images of the specimen and respective ground truth measurement data associated therewith, and one or more cost functions specifically configured to evaluate, for the plurality of training images and corresponding training measurement data outputted by the E2E learning model, one or more metrology benchmarks from a group comprising precision, correlation, and matching.


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