The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Dec. 19, 2022
Yangtze Memory Technologies Co., Ltd., Hubei, CN;
Zhen Guo, Hubei, CN;
Wei Xu, Hubei, CN;
Zhipeng Wu, Hubei, CN;
Xiaofen Zheng, Hubei, CN;
Yuan Yuan, Hubei, CN;
Lei Li, Hubei, CN;
Lei Xue, Hubei, CN;
Zongliang Huo, Hubei, CN;
Yangtze Memory Technologies Co., Ltd., Wuhan, CN;
Abstract
A method includes forming a stack of alternating insulating layers and sacrificial layers over a substrate; forming a trench through the stack to uncover the substrate to expose lateral sides of the insulating layers and the sacrificial layers, the trench extending from a core area to a stair step area of the stack; forming a liner to cover the exposed lateral sides; removing the liner in the trenches within a first area of the core area and the stair step area to expose the lateral sides of the sacrificial layers of the stack within the first area; removing the sacrificial layers within the first area; removing the liner in the trenches within a second area of the core area and the stair step area to expose the lateral sides of the sacrificial layers of the stack within the second area; and removing the sacrificial layers within the second area.