The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2025

Filed:

Sep. 23, 2020
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Glenn A. Glass, Portland, OR (US);

Anand S. Murthy, Portland, OR (US);

Robert Ehlert, Portland, OR (US);

Han Wui Then, Portland, OR (US);

Marko Radosavljevic, Portland, OR (US);

Nicole K. Thomas, Portland, OR (US);

Sandrine Charue-Bakker, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H10D 30/65 (2025.01); H10D 62/824 (2025.01); H10D 62/85 (2025.01); H10D 64/00 (2025.01); H10D 84/85 (2025.01);
U.S. Cl.
CPC ...
H10D 30/65 (2025.01); H10D 62/824 (2025.01); H10D 62/8503 (2025.01); H10D 64/111 (2025.01); H10D 84/85 (2025.01);
Abstract

Co-integrated gallium nitride (GaN) complementary metal oxide semiconductor (CMOS) integrated circuit technology is described. In an example, a semiconductor structure includes a silicon (111) substrate having a first region and a second region. A structure including gallium and nitrogen is on the first region of the silicon (111) substrate, the structure including gallium and nitrogen having a top surface. A structure including germanium is on the second region of the silicon (111) substrate, the structure including germanium having a top surface co-planar with the top surface of the structure including gallium and nitrogen. A dielectric spacer is laterally between and in contact with the structure including gallium and nitrogen and the structure including germanium, the dielectric spacer on the silicon (111) substrate.


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