The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2025
Filed:
Sep. 14, 2022
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Patrick Tae, San Jose, CA (US);
Caijun Su, San Jose, CA (US);
Ravichandra Jagannath, Milpitas, CA (US);
Brian Ahr, Ann Arbor, MI (US);
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H05G 2/0027 (2024.08); H05G 2/0084 (2024.08); H05H 1/46 (2013.01); H05H 2240/20 (2013.01);
Abstract
A light source includes a rotatable drum to be coated with xenon ice and illuminated by a laser beam to produce a plasma. The drum may also be translatable. The light source further includes a confocal chromatic sensor to measure distances from the confocal chromatic sensor to the rotatable drum. The confocal chromatic sensor may include a sensor head to focus light onto the rotatable drum and to detect reflected light from the rotatable drum. The sensor head and the rotatable drum may be disposed within a vacuum chamber.