The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Feb. 09, 2024
Kla Corporation, Milpitas, CA (US);
Alan Davila, El Paso, TX (US);
Marcus Liesching, Boulder Creek, CA (US);
Sandeep Bhagwat, Milpitas, CA (US);
Surya Vanamali, San Jose, CA (US);
Suresh Selvaraj, Fremont, CA (US);
Sravani Desu, Andhra Pradesh, IN;
Ganesh Meenakshisundaram, Austin, TX (US);
Karthik Purushothaman, Chennai, IN;
Ardis Liang, Pleasanton, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Methods and systems for generating information for use in setting up a process performed on a specimen are provided. One method includes clustering dies on a specimen based on colors assigned to the dies responsive to predicted defect densities in the dies determined from measurements performed on the specimen thereby generating initial die clusters. The method also includes analyzing the initial die clusters in location space to determine if any of the initial die clusters contain two or more die clusters. In addition, the method includes designating the initial die clusters that do not contain two or more die clusters and the two or more die clusters contained in any of the initial die clusters as the final die clusters. The method further includes storing information for the final die clusters for use in setting up a process performed on the specimen.