The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
May. 11, 2023
Kla Corporation, Milpitas, CA (US);
Houssam Chouaib, San Jose, CA (US);
Haomiao Chang, Milpitas, CA (US);
Teng Gu, Milpitas, CA (US);
Tianrong Zhan, Milpitas, CA (US);
Andrew Lagodzinski, Milpitas, CA (US);
Zhengquan Tan, Milpitas, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
An inspection system includes a controller including a memory maintaining program instructions and one or more processors configured to execute the program instructions. The program instructions cause the one or more processors to generate a geometric model of a structure of a sample, generate an optical response function model of the structure of the sample to illumination based at least in part on the geometric model, receive measured data from a detector, generate a parametric sub-structure model based on at least the optical response function model and the measured data, and extract one or more parameters of the structure based on the measured data.