The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2025
Filed:
Jul. 08, 2022
Onto Innovation Inc., Wilmington, MA (US);
Petar Žuvela, Singapore, SG;
Jingsheng Shi, Singapore, SG;
Wei Ming Chiew, Singapore, SG;
Jie Li, San Jose, CA (US);
Onto Innovation Inc., Wilmington, MA (US);
Abstract
Optical measurement of a sample that includes a structure-of-interest (SOI) optically coupled to an unknown structure is optically measured by extracting from the resulting spectral signal the spectral variation that is correlated to key parameters associated with the SOI and removing the spectral variation from unknown structure that is irrelevant to the key parameters. An offline process is used to generate a physics-based model from a number of calibration measurements using reconstructed spectral signals after removing the spectral variation from the spectral signals that is irrelevant to the key parameters. A machine learning model may be additionally generated using at least the spectral variations correlated to key parameters associated with the SOI. In an in-line process, a sample is measured by filtering the spectral signals from a sample to remove spectral effects from the unknown structure and using the physics-based model or using the trained machine learning model.