The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2024

Filed:

Dec. 21, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

TsuChing Yang, Taipei, TW;

Hung-Chang Sun, Kaohsiung, TW;

Sheng-Chih Lai, Hsinchu County, TW;

Yu-Wei Jiang, Hsinchu, TW;

Kuo-Chang Chiang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 21/768 (2006.01); H01L 23/528 (2006.01); H10B 51/20 (2023.01); H10B 51/30 (2023.01); H10B 51/40 (2023.01);
U.S. Cl.
CPC ...
H01L 23/5226 (2013.01); H01L 21/76816 (2013.01); H01L 21/76877 (2013.01); H01L 23/5283 (2013.01); H10B 51/20 (2023.02); H10B 51/30 (2023.02); H10B 51/40 (2023.02);
Abstract

A memory device includes a stacked structure including a plurality of memory cells, and first and second flights of steps. The first flights of steps are disposed at an end of the stacked structure along the first direction. The second flights of steps are adjacent to the first flights of steps disposed at the end of the stacked structure along the first direction. The first flights of steps and the second flights of steps comprise first portions and second portions alternately disposed along the first direction. The second portions are wider than the first portions along the second direction.


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