The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2024
Filed:
Dec. 24, 2019
Asml Netherlands B.v., Veldhoven, NL;
Simon Gijsbert Josephus Mathijssen, Rosmalen, NL;
Marc Johannes Noot, Eindhoven, NL;
Kaustuve Bhattacharyya, Veldhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Grzegorz Grzela, Eindhoven, NL;
Timothy Dugan Davis, Portland, OR (US);
Olger Victor Zwier, Eindhoven, NL;
Ralph Timotheus Huijgen, Hillsboro, OR (US);
Peter David Engblom, Portland, OR (US);
Jan-Willem Gemmink, Riethoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method provides the steps of receiving an image from a metrology tool, determining individual units of said image and discriminating the units which provide accurate metrology values. The images are obtained by measuring the metrology target at multiple wavelengths. The discrimination between the units, when these units are pixels in said image, is based on calculating a degree of similarity between said units.