The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Jun. 17, 2021
Kla Corporation, Milpitas, CA (US);
Eitan Hajaj, Ashqelon, IL;
Amnon Manassen, Haifa, IL;
Shlomo Eisenbach, Migdal HaEmek, IL;
Anna Golotsvan, Qiryat Tivon, IL;
Yoav Grauer, Milpitas, CA (US);
Eugene Maslovsky, Haifa, IL;
KLA Corporation, Milpitas, CA (US);
Abstract
A product includes at least one semiconductor substrate, multiple thin-film layers disposed on the at least one substrate, and an overlay target formed in at least one of the thin-film layers. The overlay target includes a first sub-target having a first center of symmetry and including first target features having a first linewidth, and a second sub-target having a second center of symmetry coincident with the first center of symmetry and including second target features, which have a second linewidth, greater than the first linewidth, and are adjacent to but non-overlapping with the first target features.