The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2023

Filed:

Jan. 31, 2022
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Ming-Chang Wen, Kaohsiung, TW;

Chang-Yun Chang, Taipei, TW;

Hsien-Chin Lin, Hsinchu, TW;

Hung-Kai Chen, Taichung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/3215 (2006.01); H01L 21/3105 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/8258 (2006.01); H01L 21/8238 (2006.01); H01L 21/762 (2006.01); H01L 27/02 (2006.01); H10B 10/00 (2023.01);
U.S. Cl.
CPC ...
H01L 21/0214 (2013.01); H01L 21/02164 (2013.01); H01L 21/31056 (2013.01); H01L 21/32155 (2013.01); H01L 21/8258 (2013.01); H01L 21/823814 (2013.01); H01L 29/0649 (2013.01); H01L 29/66545 (2013.01); H01L 29/785 (2013.01); H01L 29/7848 (2013.01); H01L 21/76224 (2013.01); H01L 27/0207 (2013.01); H10B 10/12 (2023.02);
Abstract

A semiconductor structure includes a substrate; an isolation structure over the substrate; a first fin extending from the substrate and through the isolation structure; a first source/drain structure over the first fin; a contact etch stop layer over the isolation structure and contacting a first side face of the first source/drain structure; and a first dielectric structure contacting a second side face of the first source/drain structure. The first side face and the second side face are on opposite sides of the first fin in a cross-sectional view cut along a widthwise direction of the first fin. The first dielectric structure extends higher than the first source/drain structure.


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