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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11705323 B1

PDFFull Text
Date of Patent:
Jul. 18, 2023

Filed:

Oct. 23, 2020

Wafer trimming device

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jungseok Ahn, Seoul, KR;

Unbyoung Kang, Hwaseong-si, KR;

Chungsun Lee, Asan-si, KR;

Teakhoon Lee, Hwaseong-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD.;

Attorney:

Myers Bigel, P.A.

Primary Examiner:

David Vu

Assistant Examiner:

Brandon C Fox

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/304 (2006.01); B24B 21/00 (2006.01); B28D 5/02 (2006.01); B26D 7/18 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02021 (2013.01); B24B 21/002 (2013.01); B26D 7/18 (2013.01); B28D 5/02 (2013.01); H01L 21/304 (2013.01); H01L 21/68 (2013.01);
Abstract

The wafer trimming device includes a chuck table configured to hold a target wafer via suction, thereby fixing the target wafer, a notch trimmer configured to trim a notch of the target wafer, and an edge trimmer configured to trim an edge of the target wafer. The notch trimmer includes a notch trimming blade configured to rotate about a rotation axis perpendicular to a circumferential surface of the target wafer. The edge trimmer includes an edge trimming blade configured to rotate about a rotation axis parallel to the circumferential surface of the target wafer.

Find Patent Forward Citations

Ahn, Jungseok. (2023). Wafer trimming device (U.S. Patent No. 11705323). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11705323

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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