The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2023

Filed:

Dec. 04, 2018
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Johann C. Rode, Hillsboro, OR (US);

Samuel J. Beach, Aloha, OR (US);

Nidhi Nidhi, Hillsboro, OR (US);

Rahul Ramaswamy, Portland, OR (US);

Han Wui Then, Portland, OR (US);

Walid Hafez, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/51 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/49 (2006.01); H01L 29/786 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 29/513 (2013.01); H01L 21/022 (2013.01); H01L 21/02181 (2013.01); H01L 21/02189 (2013.01); H01L 21/28158 (2013.01); H01L 29/0673 (2013.01); H01L 29/42364 (2013.01); H01L 29/42392 (2013.01); H01L 29/4908 (2013.01); H01L 29/517 (2013.01); H01L 29/66742 (2013.01); H01L 29/66795 (2013.01); H01L 29/7851 (2013.01); H01L 29/78696 (2013.01);
Abstract

An integrated circuit includes a gate structure in contact with a portion of semiconductor material between a source region and a drain region. The gate structure includes gate dielectric and a gate electrode. The gate dielectric includes at least two hybrid stacks of dielectric material. Each hybrid stack includes a layer of low-κ dielectric and a layer of high-κ dielectric on the layer of low-κ dielectric, where the layer of high-κ dielectric has a thickness at least two times the thickness of the layer of low-κ dielectric. In some cases, the layer of low-κ dielectric has a thickness no greater than 1.5 nm. The layer of high-κ dielectric may be a composite layer that includes two or more layers of compositionally-distinct materials. The gate structure can be used with any number of transistor configurations but is particularly useful with respect to group III-V transistors.


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