The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2023
Filed:
Feb. 15, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jie Zhou, San Jose, CA (US);
Erica Chen, Cupertino, CA (US);
Qiwei Liang, Fremont, CA (US);
Chentsau Chris Ying, Cupertino, CA (US);
Srinivas D. Nemani, Sunnyvale, CA (US);
Ellie Y. Yieh, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 16/02 (2006.01); C23C 16/26 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02527 (2013.01); C23C 16/02 (2013.01); C23C 16/26 (2013.01); H01L 21/0262 (2013.01); H01L 21/02425 (2013.01); H01L 21/02488 (2013.01);
Abstract
A method of forming graphene layers is disclosed. A method of improving graphene deposition is also disclosed. Some methods are advantageously performed at lower temperatures. Some methods advantageously provide graphene layers with lower resistance. Some methods advantageously provide graphene layers in a relatively short period of time.