The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2023
Filed:
Oct. 13, 2021
Rohm and Haas Electronic Materials Cmp Holdings, Inc., Newark, DE (US);
Dupont Electronics, Inc., Wilmington, DE (US);
Bainian Qian, Newark, DE (US);
Robert M. Blomquist, River Edge, NJ (US);
Lyla M. El-Sayed, Boonton, NJ (US);
Michael E. Mills, Bear, DE (US);
Kancharla-Arun Reddy, Wilmington, DE (US);
Bradley K. Taylor, West Chester, PA (US);
Shijing Xia, Hockessin, DE (US);
Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US);
DuPont Electronics, Inc., Wilmington, DE (US);
Abstract
The present invention concerns a chemical mechanical polishing pad having a polishing layer. The polishing layer contains an extruded sheet. The extruded sheet is prepared by extruding a compounded photopolymerizable composition followed by exposure to UV light.