The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Aug. 02, 2019
Zhejiang University, Zhejiang, CN;
Yongying Yang, Zhejiang, CN;
Weimin Lou, Zhejiang, CN;
Fanyi Wang, Zhejiang, CN;
Yubin Du, Zhejiang, CN;
Pan Guo, Zhejiang, CN;
Shiwei Chen, Zhejiang, CN;
ZHEJIANG UNIVERSITY, Zhejiang, CN;
Abstract
In a real-time traceability method of a width of a defect based on divide-and-conquer provided by the present invention, through the calibration transfer function, the multidimensional eigenvector analysis technology based on the electromagnetic field simulation database of defect scattered dark-field imaging and the adaptive threshold segmentation method, the real-time traceability of the width of the defect greater than and close to the diffraction limit of the system is performed, respectively. The extreme random tree regression model is trained by multidimensional eigenvector analysis technology based on the multidimensional eigenvectors in the electromagnetic field simulation database of the defect scattered dark-field imaging. The present invention solves the problems that the width of the defect in defect detection is difficult to be accurately measured in real time, and the conventional image processing algorithm is difficult to accurately identify the width of the defect close to the diffraction limit of the system.