The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2023

Filed:

Apr. 28, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chung-Jung Wu, Hsinchu, TW;

Chih-Hang Tung, Hsinchu, TW;

Tung-Liang Shao, Hsinchu, TW;

Sheng-Tsung Hsiao, Taoyuan, TW;

Jen-Yu Wang, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/46 (2006.01); H01L 21/52 (2006.01); H01L 23/40 (2006.01); H01L 23/42 (2006.01); H01L 23/473 (2006.01); H01L 23/498 (2006.01);
U.S. Cl.
CPC ...
H01L 23/46 (2013.01); H01L 21/52 (2013.01); H01L 23/4006 (2013.01); H01L 23/42 (2013.01); H01L 23/473 (2013.01); H01L 23/49827 (2013.01); H01L 2023/4087 (2013.01);
Abstract

A semiconductor device includes a package and a cooling cover. The package includes a first die having an active surface and a rear surface opposite to the active surface. The rear surface has a cooling region and a peripheral region enclosing the cooling region. The first die includes micro-trenches located in the cooling region of the rear surface. The cooling cover is stacked on the first die. The cooling cover includes a fluid inlet port and a fluid outlet port located over the cooling region and communicated with the micro-trenches.


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