The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2023
Filed:
Dec. 26, 2018
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Noriyuki Sato, Hillsboro, OR (US);
Kevin Lin, Beaverton, OR (US);
Kevin O'Brien, Portland, OR (US);
Hui Jae Yoo, Portland, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/532 (2006.01); H01L 43/10 (2006.01); H01L 43/12 (2006.01); H01L 23/522 (2006.01); H01L 21/768 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
H01L 23/53209 (2013.01); H01L 21/76877 (2013.01); H01L 23/5226 (2013.01); H01L 43/10 (2013.01); H01L 43/12 (2013.01); H01L 21/32134 (2013.01); H01L 21/32139 (2013.01); H01L 21/76843 (2013.01);
Abstract
A multilayer conductive line is disclosed. The multilayer conductive line includes a dielectric layer, a Ta barrier layer on the dielectric layer and a superlattice on the Ta barrier layer. The superlattice includes a plurality of interleaved ferromagnetic and non-ferromagnetic material.