The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2023
Filed:
Dec. 29, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Kris Bhaskar, San Jose, CA (US);
Laurent Karsenti, Rehovot, IL;
Scott Young, Soquel, CA (US);
Mohan Mahadevan, Livermore, CA (US);
Jing Zhang, Santa Clara, CA (US);
Brian Duffy, San Jose, CA (US);
Li He, San Jose, CA (US);
Huajun Ying, San Jose, CA (US);
Hung Nien, San Jose, CA (US);
Sankar Venkataraman, Milpitas, CA (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Methods and systems for accelerated training of a machine learning based model for semiconductor applications are provided. One method for training a machine learning based model includes acquiring information for non-nominal instances of specimen(s) on which a process is performed. The machine learning based model is configured for performing simulation(s) for the specimens. The machine learning based model is trained with only information for nominal instances of additional specimen(s). The method also includes re-training the machine learning based model with the information for the non-nominal instances of the specimen(s) thereby performing transfer learning of the information for the non-nominal instances of the specimen(s) to the machine learning based model.