The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Dec. 02, 2020
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Hsin-Chang Lee, Zhubei, TW;
Pei-Cheng Hsu, Taipei, TW;
Hao-Ping Cheng, Hsinchu, TW;
Ta-Cheng Lien, Cyonglin Township, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/82 (2012.01); G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
G03F 1/82 (2013.01); G03F 1/64 (2013.01);
Abstract
In a method of cleaning a photo mask, the photo mask is placed on a support such that a patterned surface faces down, and an adhesive sheet is applied to edges of a backside surface of the photo mask.