The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
Aug. 28, 2018
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Anton Wilhelmus Duys, Eindhoven, NL;
Maxim Aleksandrovich Nasalevich, Eindhoven, NL;
Arnoud Willem Notenboom, Rosmalen, NL;
Mária Péter, Eindhoven, NL;
Pieter-Jan Van Zwol, Eindhoven, NL;
David Ferdinand Vles, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01);
Abstract
A pellicle frame for supporting a pellicle, the frame having a first surface and a second surface opposite the first surface, and a structure provided between the first and the second surfaces, wherein the first and second surfaces and the structure at least partially define at least one volume therebetween that is devoid of the material that forms the frame.