The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
Jul. 22, 2019
Applicants:
Rohm and Haas Electronic Materials Korea Ltd., Cheonan-si, KR;
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Jung-June Lee, Cheonan-si, KR;
Jae-Yun Ahn, Cheonan-si, KR;
Jae-Hwan Sim, Cheonan-si, KR;
Jae-Bong Lim, Cheonan-si, KR;
Emad Aqad, Northborough, MA (US);
Myung-Yeol Kim, Hwaseong-si, KR;
Assignees:
ROHM AND HAAS ELECTRONIC MATERIALS LLC, Marlborough, MA (US);
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/09 (2006.01); G03F 7/00 (2006.01); C08G 12/42 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C08G 12/427 (2013.01); G03F 7/0035 (2013.01); G03F 7/091 (2013.01);
Abstract
An antireflective coating composition, including a polymer, a photoacid generator having a crosslinkable group, a compound capable of crosslinking the polymer and the photoacid generator, a thermal acid generator, and an organic solvent.