The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
May. 18, 2018
Asml Netherlands B.v., Veldhoven, NL;
Emil Peter Schmitt-Weaver, Eindhoven, NL;
Kaustuve Bhattacharyya, Veldhoven, NL;
Rene Marinus Gerardus Johan Queens, Boise, ID (US);
Wolfgang Helmut Henke, Kempen, DE;
Wim Tjibbo Tel, Helmond, NL;
Theodorus Franciscus Adrianus Maria Linschoten, Oirschot, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A system comprises a topography measurement system configured to determine a respective height for each of a plurality of locations on a substrate; and a processor configured to: determine a height map for the substrate based on the determined heights for the plurality of locations; and determine at least one alignment parameter for the substrate by comparing the height map and a reference height map, wherein the reference height map comprises or represents heights for a plurality of locations on a reference substrate portion.