The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Nov. 10, 2019
Kla-tencor Corporation, Milpitas, CA (US);
Walter H. Johnson, III, Rocklin, CA (US);
Nanchang Zhu, Shanghai, CN;
Xianghua Liu, Shanghai, CN;
Jianli Cui, Shanghai, CN;
Zhu-bin Shi, Shanghai, CN;
Zhuoxian Zhang, Shanghai, CN;
Haiyang You, Shanghai, CN;
Lu Yu, Shanghai, CN;
Jianou Shi, Palo Alto, CA (US);
Fan Zhang, Shanghai, CN;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Resistivity probes can be used to test integrated circuits. In one example, a resistivity probe has a substrate with multiple vias and multiple metal pins. Each of the metal pins is disposed in one of the vias. The metal pins extend out of the substrate. Interconnects provide an electrical connection to the metal pins. In another example, a resistivity probe has a substrate with a top surface and multiple elements extending from the substrate. Each of the elements curves from the substrate to a tip of the element such that each of the elements is non-parallel to the top surface of the substrate.