The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Jan. 29, 2020
Applicant:
Jeol Ltd., Tokyo, JP;
Inventors:
Yoshikazu Nemoto, Tokyo, JP;
Yuta Murakami, Tokyo, JP;
Takakuni Maeda, Tokyo, JP;
Akira Abe, Tokyo, JP;
Masatsugu Kawamoto, Tokyo, JP;
Hiroki Mezaki, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/222 (2013.01); H01J 37/226 (2013.01); H01J 37/28 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/20285 (2013.01); H01J 2237/221 (2013.01); H01J 2237/226 (2013.01); H01J 2237/24578 (2013.01);
Abstract
First shape data representing a three-dimensional shape of a sample unit including a sample is generated based on a result of three-dimensional shape measurement of the sample. Second shape data representing a three-dimensional shape of a structure which exists in a sample chamber is generated. Movement of the sample unit is controlled based on the first shape data and the second shape data such that collision of the sample unit with the structure does not occur.