The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 14, 2021

Filed:

May. 15, 2020
Applicant:

Samsung Sdi Co., Ltd., Yongin-si, KR;

Inventors:

Seungwoo Jang, Suwon-si, KR;

Taeksoo Kwak, Suwon-si, KR;

Jin-Hee Bae, Suwon-si, KR;

Hyeonsu Jo, Suwon-si, KR;

Euihyun Kim, Suwon-si, KR;

Kunbae Noh, Suwon-si, KR;

Jun Sakong, Suwon-si, KR;

Chungheon Lee, Suwon-si, KR;

Wanhee Lim, Suwon-si, KR;

Byeonggyu Hwang, Suwon-si, KR;

Assignee:

Samsung SDI Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C01B 21/087 (2006.01); C01B 33/12 (2006.01); H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02164 (2013.01); C01B 21/087 (2013.01); C01B 33/126 (2013.01); H01L 21/02282 (2013.01); H01L 21/02288 (2013.01); H01L 27/10805 (2013.01);
Abstract

Disclosed is a composition for forming a silica layer including perhydropolysilazane (PHPS) and a solvent, wherein in anH-NMR spectrum of the perhydropolysilazane (PHPS) in CDCl, when a peak derived from NSiHand NSiHis referred to as Peak 1 and a peak derived from NSiHis referred to as Peak 2, a ratio (P/(P+P)) of an area (P) of Peak 1 relative to a total area (P+P) of the Peak 1 and Peak 2 is greater than or equal to 0.77, and when an area from a minimum point between the peaks of Peak 1 and Peak 2 to 4.78 ppm is referred to as a Region B and an area from 4.78 ppm to a minimum point of Peak 1 is referred to as a Region A of the area of Peak 1, a ratio (P/P) of an area (P) of Region A relative to an area (P) of Region B is greater than or equal to about 1.5.


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