The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2021
Filed:
Mar. 25, 2016
Asml Netherlands B.v., Veldhoven, NL;
Everhardus Cornelis Mos, Best, NL;
Velislava Ignatova, Eindhoven, NL;
Erik Jensen, Veldhoven, NL;
Michael Kubis, Meerbusch, DE;
Hubertus Johannes Gertrudus Simons, Venlo, NL;
Peter Ten Berge, Eindhoven, NL;
Erik Johannes Maria Wallerbos, Helmond, NL;
Jochem Sebastiaan Wildenberg, Aarle-Rixtel, NL;
ASML Netherands B.V., Veldhoven, NL;
Abstract
A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.