The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 26, 2021

Filed:

Nov. 27, 2019
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Hiranmay Biswas, Kolkata, IN;

Chung-Hsing Wang, Baoshan Township, TW;

Kuo-Nan Yang, Hsinchu, TW;

Yi-Kan Cheng, Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/394 (2020.01); H01L 27/02 (2006.01); G06F 30/398 (2020.01); H01L 27/118 (2006.01); G06F 119/06 (2020.01);
U.S. Cl.
CPC ...
G06F 30/394 (2020.01); G06F 30/398 (2020.01); H01L 27/0207 (2013.01); G06F 2119/06 (2020.01); H01L 27/11807 (2013.01);
Abstract

A method of a layout diagram (of a conductive line structure for an IC) including: for a first set of pillar patterns included in an initial layout diagram that represents portions of an M(i) layer of metallization and where i is a non-negative number, the first set including first and second pillar patterns which are non-overlapping of each other, which have long axes that are substantially collinear with a reference line, and which have a first distance of separation, determining a first distance of separation as between corresponding immediately adjacent members of the first set; recognizing that the first distance is less than a transverse routing (TVR) separation threshold for an M(i+j) layer of metallization, where j is an integer and j≥2; and increasing the first distance so as to become a second distance which is greater than the TVR separation threshold of the M(i+j) layer.


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