The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Jun. 17, 2019
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Assignee:
Entegris, Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3213 (2006.01); H01L 21/311 (2006.01); H01L 21/306 (2006.01); C09K 13/08 (2006.01); C09K 13/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31111 (2013.01); C09K 13/08 (2013.01); H01L 21/30604 (2013.01); H01L 21/31105 (2013.01); H01L 21/31116 (2013.01); H01L 21/31122 (2013.01); H01L 21/3213 (2013.01); H01L 21/32133 (2013.01); H01L 21/32134 (2013.01);
Abstract
A method of selectively removing aluminium oxide or nitride material from a microelectronic substrate, the method comprising contacting the material with an aqueous etching composition comprising: an etchant comprising a source of fluoride; and a metal corrosion inhibitor; wherein the composition has a pH in the range of from 3 to 8. Aqueous etching compositions and uses are also described.