The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 11, 2021

Filed:

Jul. 27, 2020
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Kuo-Chi Tu, Hsinchu, TW;

Jen-Sheng Yang, Keelung, TW;

Sheng-Hung Shih, Hsinchu, TW;

Tong-Chern Ong, Taipei, TW;

Wen-Ting Chu, Kaohsiung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/51 (2006.01); G11C 11/22 (2006.01); H01L 27/1159 (2017.01); H01L 27/11592 (2017.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78391 (2014.09); G11C 11/2257 (2013.01); G11C 11/2273 (2013.01); H01L 27/1159 (2013.01); H01L 27/11592 (2013.01); H01L 29/513 (2013.01); H01L 29/516 (2013.01); H01L 29/6684 (2013.01); H01L 29/66545 (2013.01); G11C 11/223 (2013.01);
Abstract

A semiconductor device includes a memory circuit and a logic circuit. The memory circuit includes a word line, a bit line, a common line and a memory transistor having a gate coupled to the word line, a drain coupled to the bit line and a source coupled to the common line. The logic circuit includes a field effect transistor (FET) having a gate, a drain and a source. The memory transistor has a gate electrode layer formed on a gate dielectric layer, and the gate dielectric layer includes a first insulating layer and a first ferroelectric (FE) material layer. The FET has a gate electrode layer formed on a gate dielectric layer, and the gate dielectric layer includes a second insulating layer and a second FE material layer.


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