The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Apr. 22, 2019
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Yen-Ru Lee, Hsinchu, TW;
Chii-Horng Li, Zhubei, TW;
Chien-I Kuo, Hsinchu, TW;
Li-Li Su, ChuBei, TW;
Chien-Chang Su, Kaohsiung, TW;
Heng-Wen Ting, Hsinchu, TW;
Jung-Chi Tai, Tainan, TW;
Che-Hui Lee, Taipei, TW;
Ying-Wei Li, Taichung, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
An embodiment is a structure including a first fin over a substrate, a second fin over the substrate, the second fin being adjacent the first fin, an isolation region surrounding the first fin and the second fin, a gate structure along sidewalls and over upper surfaces of the first fin and the second fin, the gate structure defining channel regions in the first fin and the second fin, a source/drain region on the first fin and the second fin adjacent the gate structure, and an air gap separating the source/drain region from a top surface of the substrate.