The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 20, 2021

Filed:

Sep. 25, 2018
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chun-Hao Tseng, Taichung, TW;

Ying-Hao Kuo, Hsinchu, TW;

Kai-Fang Cheng, Taoyuan, TW;

Hai-Ching Chen, Hsinchu, TW;

Tien-I Bao, Taoyuan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/132 (2006.01); H01L 21/56 (2006.01); H01L 29/06 (2006.01); H01L 23/31 (2006.01); G02B 6/138 (2006.01); G02B 6/122 (2006.01); G02B 6/136 (2006.01); H01L 21/48 (2006.01); G02B 6/12 (2006.01);
U.S. Cl.
CPC ...
G02B 6/132 (2013.01); G02B 6/122 (2013.01); G02B 6/136 (2013.01); G02B 6/138 (2013.01); H01L 21/48 (2013.01); H01L 21/56 (2013.01); H01L 21/563 (2013.01); H01L 23/3142 (2013.01); H01L 23/3192 (2013.01); H01L 29/06 (2013.01); G02B 2006/12104 (2013.01); H01L 2224/73204 (2013.01);
Abstract

An apparatus comprises a substrate having a plateau region and a trench region, a metal layer over the plateau region, a semiconductor component over the trench region, wherein a gap is between the plateau region and the semiconductor component, an adhesion promoter layer over the plateau region, the semiconductor component and the gap, a dielectric layer over the adhesion promoter layer and a bonding interface formed between the adhesion promoter layer and the dielectric layer, wherein the bonding interface comprises a chemical structure comprising a first dielectric material of the adhesion promoter layer and a second dielectric material of the dielectric layer.


Find Patent Forward Citations

Loading…