The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 30, 2021

Filed:

Sep. 21, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Kong-Beng Thei, Pao-Shan Village, TW;

Dun-Nian Yaung, Taipei, TW;

Fu-Jier Fan, Hsinchu, TW;

Hsing-Chih Lin, Tainan, TW;

Hsiao-Chin Tuan, Taowan, TW;

Jen-Cheng Liu, Hsin-Chu, TW;

Alexander Kalnitsky, San Francisco, CA (US);

Yi-Sheng Chen, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 27/06 (2006.01); H01L 23/48 (2006.01); H01L 23/00 (2006.01); H01L 23/522 (2006.01); H01L 23/31 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0688 (2013.01); H01L 21/4857 (2013.01); H01L 23/3171 (2013.01); H01L 23/481 (2013.01); H01L 23/5226 (2013.01); H01L 23/562 (2013.01); H01L 24/03 (2013.01); H01L 24/06 (2013.01); H01L 24/89 (2013.01); H01L 2224/02372 (2013.01); H01L 2224/03916 (2013.01); H01L 2224/80001 (2013.01);
Abstract

A three-dimensional (3D) integrated circuit (IC) and associated forming method are provided. In some embodiments, a second IC die is bonded to a first IC die through a second bonding structure and a first bonding structure at a bonding interface. The bonding encloses a seal-ring structure in a peripheral region of the 3D IC in the first and second IC dies. The seal-ring structure extends from the first semiconductor substrate to the second semiconductor substrate. The bonding forms a plurality of through silicon via (TSV) coupling structures at the peripheral region of the 3D IC along an inner perimeter of the seal-ring structure by electrically and correspondingly connects a first plurality of TSV wiring layers and inter-wire vias and a second plurality of TSV wiring layers and inter-wire vias.


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