The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 16, 2021

Filed:

Aug. 01, 2017
Applicants:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Soitec, Bernin, FR;

Inventors:

Didier Landru, Le Champ-près-Froges, FR;

Nadia Ben Mohamed, Echirolles, FR;

Oleg Kononchuk, Theys, FR;

Frederic Mazen, Saint Egreve, FR;

Damien Massy, Grenoble, FR;

Shay Reboh, Grenoble, FR;

Francois Rieutord, Saint Egreve, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/324 (2006.01); H01L 21/263 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76254 (2013.01); H01L 21/263 (2013.01); H01L 21/324 (2013.01); H01L 21/76251 (2013.01);
Abstract

A useful layer is layered onto a support by a method that includes the steps of forming an embrittlement plane by implanting light elements into a first substrate, so as to form a useful layer between such plane and one surface of the first substrate; applying the support onto the surface of the first substrate so as to form an assembly to be fractured; applying a heat treatment for embrittling the assembly to be fractured; and initiating and propagating a fracture wave into the first substrate along the embrittlement plane. The fracture wave is initiated in a central area of the embrittlement plane and the propagation speed of the wave is controlled so that the velocity thereof is sufficient to cause the interactions of the fracture wave with acoustic vibrations emitted upon the initiation and/or propagation thereof, if any, are confined to a peripheral area of the useful layer.


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