The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2021
Filed:
Mar. 30, 2016
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Glenn A. Glass, Portland, OR (US);
Anand S. Murthy, Portland, OR (US);
Karthik Jambunathan, Portland, OR (US);
Chandra S. Mohapatra, Hillsboro, OR (US);
Hei Kam, Hillsboro, OR (US);
Nabil G. Mistkawi, Keizer, OR (US);
Jun Sung Kang, Hillsboro, OR (US);
Biswajeet Guha, Hillsboro, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/308 (2006.01); H01L 29/78 (2006.01); H01L 21/8238 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); H01L 29/775 (2006.01); B82Y 10/00 (2011.01); H01L 29/08 (2006.01); H01L 29/423 (2006.01); H01L 27/092 (2006.01); H01L 21/8258 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7851 (2013.01); B82Y 10/00 (2013.01); H01L 21/3081 (2013.01); H01L 21/823821 (2013.01); H01L 29/0673 (2013.01); H01L 29/0847 (2013.01); H01L 29/1037 (2013.01); H01L 29/4232 (2013.01); H01L 29/6681 (2013.01); H01L 29/66439 (2013.01); H01L 29/66545 (2013.01); H01L 29/66818 (2013.01); H01L 29/775 (2013.01); H01L 29/78 (2013.01); H01L 21/8258 (2013.01); H01L 21/823807 (2013.01); H01L 27/0924 (2013.01); H01L 29/0669 (2013.01);
Abstract
A trench is formed in an insulating layer to expose a native fin on a substrate. A replacement fin is deposited on the native fin in the trench. The replacement fin is trimmed laterally.