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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10923368 B1

PDFFull Text
Date of Patent:
Feb. 16, 2021

Filed:

Oct. 19, 2018

Substrate processing apparatus, substrate processing method, and storage medium

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Takao Inada, Kumamoto, JP;

Hisashi Kawano, Kumamoto, JP;

Hiroki Ohno, Tokyo, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Abelman, Frayne & Schwab

Primary Examiner:

Ram N Kackar

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/66 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67086 (2013.01); H01L 21/31111 (2013.01); H01L 21/67017 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 22/26 (2013.01);
Abstract

A substrate processing apparatus according to an embodiment includes a substrate processing tank, a temperature adjustment unit, and a controller. The substrate processing tank is configured to perform an etching processing by immersing a substrate in a phosphoric acid processing liquid therein. The temperature adjustment unit is configured to adjust the temperature of the phosphoric acid processing liquid. The controller is configured to control the temperature adjustment unit to lower the temperature of the phosphoric acid processing liquid as the etching processing proceeds.

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Inada, Takao. (2021). Substrate processing apparatus, substrate processing method, and storage medium (U.S. Patent No. 10923368). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10923368

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