The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Aug. 06, 2019
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Hongjun Zhou, Chandler, AZ (US);
John Edward Quincy Hughes, Cave Creek, AZ (US);
Krishna P. Murella, Phoenix, AZ (US);
Reinaldo Mario Machado, Phoenix, AZ (US);
Mark Leonard O'Neill, Queen Creek, AZ (US);
Dnyanesh Chandrakant Tamboli, Gilbert, AZ (US);
Assignee:
Versum Materials US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/463 (2006.01); H01L 21/461 (2006.01); H01L 21/321 (2006.01); H01L 21/3105 (2006.01); H01L 21/306 (2006.01); H01L 21/304 (2006.01); H01L 21/302 (2006.01); C09K 3/14 (2006.01); C09G 1/02 (2006.01); C09G 1/00 (2006.01); B24B 37/04 (2012.01);
U.S. Cl.
CPC ...
C09K 3/1436 (2013.01); B24B 37/044 (2013.01); C09G 1/00 (2013.01); C09G 1/02 (2013.01); C09K 3/14 (2013.01); C09K 3/1409 (2013.01); C09K 3/1454 (2013.01); C09K 3/1463 (2013.01); H01L 21/302 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01); H01L 21/31053 (2013.01); H01L 21/3212 (2013.01); H01L 21/461 (2013.01); H01L 21/463 (2013.01);
Abstract
Composite particles with lower mean particle size and smaller size distribution are obtained through refining treatments. The refined composite particles, such as ceria coated silica particles are used in Chemical Mechanical Planarization (CMP) compositions to offer higher removal rate; very low within wafer (WWNU) for removal rate, low dishing and low defects for polishing oxide films.