The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Jun. 26, 2018
Ebara Corporation, Tokyo, JP;
Takeshi Sakurai, Tokyo, JP;
Eiji Hirai, Tokyo, JP;
Kaoru Hamaura, Tokyo, JP;
Mitsuru Miyazaki, Tokyo, JP;
Koji Maruyama, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A substrate cleaning deviceincludes a substrate holding unitconfigured to hold a substrate W, a first cleaning unithaving a first cleaning membercaused to come into contact with a first surface WA of the substrate W held by the substrate holding unitto clean the first surface WA, a second cleaning unithaving a second cleaning membercaused to come into contact with the first surface WA of the substrate W held by the substrate holding unitto clean the first surface WA, and a controllerconfigured to control the first and second cleaning unitsso that, when any one of the first cleaning memberand the second cleaning membercleans the first surface WA of the substrate W held by the substrate holding unit, the other cleaning member is at a position apart from the substrate W held by the substrate holding unit