The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Jul. 12, 2017
Rigaku Corporation, Tokyo, JP;
Kiyoshi Ogata, Tokyo, JP;
Kazuhiko Omote, Tokyo, JP;
Sei Yoshihara, Tokyo, JP;
Yoshiyasu Ito, Tokyo, JP;
Hiroshi Motono, Tokyo, JP;
Hideaki Takahashi, Tokyo, JP;
Takao Kinefuchi, Tokyo, JP;
Akifusa Higuchi, Tokyo, JP;
Shiro Umegaki, Tokyo, JP;
Shigematsu Asano, Tokyo, JP;
Ryotaro Yamaguchi, Tokyo, JP;
Katsutaka Horada, Tokyo, JP;
Makoto Kambe, Tokyo, JP;
Licai Jiang, Auburn Hills, MI (US);
Boris Verman, Auburn Hills, MI (US);
RIGAKU CORPORATION, Tokyo, JP;
Abstract
In an X-ray inspection device according to the present invention, an X-ray irradiation unitincludes a first X-ray optical elementfor focusing characteristic X-rays in a vertical direction, and a second X-ray optical elementfor focusing the characteristic X-rays in a horizontal direction. The first X-ray optical elementis constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.