The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2020

Filed:

Feb. 12, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Julien Frougier, Albany, NY (US);

Nicolas Loubet, Guilderland, NY (US);

Ruilong Xie, Schenectady, NY (US);

Daniel Chanemougame, Albany, NY (US);

Ali Razavieh, Albany, NY (US);

Kangguo Cheng, Schenectady, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/43 (2006.01); H01L 29/78 (2006.01); H01L 49/00 (2006.01); H01L 21/3105 (2006.01); H01L 23/525 (2006.01); H01L 23/522 (2006.01); H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H04L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/435 (2013.01); H01L 21/31053 (2013.01); H01L 21/823431 (2013.01); H01L 23/522 (2013.01); H01L 23/525 (2013.01); H01L 27/0886 (2013.01); H01L 29/785 (2013.01); H01L 49/003 (2013.01); H04L 67/10 (2013.01);
Abstract

Fabricating a steep-switch transistor includes receiving a semiconductor structure including a substrate, a fin disposed on the substrate, a plurality of source/drains disposed on the substrate adjacent to the fin, a gate disposed upon the fin, a cap disposed on the gate, and a plurality of trenches, each trench extending to a corresponding one of the plurality of source/drains. A trench contact is formed in each of the trenches in contact with the corresponding source/drain. A recess is formed in a portion of each trench contact below a top surface of the cap. A bi-stable resistive system (BRS) material is deposited in each recess in contact with the portion of the trench contact. A source/drain contact is formed upon the BRS material, a portion of the trench contact, the BRS material, and a portion of the source/drain contact forming a reversible switch for each of the corresponding source/drains.


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