The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Aug. 13, 2018
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Kun-Mu Li, Zhudong Township, Hsinchu County, TW;

Wei-Yang Lee, Taipei, TW;

Wen-Chu Hsiao, Tainan, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01); H01L 29/40 (2006.01); H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H01L 21/768 (2006.01); H01L 29/08 (2006.01); H01L 29/16 (2006.01); H01L 27/092 (2006.01); H01L 21/8238 (2006.01); H01L 29/161 (2006.01); H01L 29/165 (2006.01);
U.S. Cl.
CPC ...
H01L 29/785 (2013.01); H01L 21/76897 (2013.01); H01L 21/823418 (2013.01); H01L 21/823431 (2013.01); H01L 21/823475 (2013.01); H01L 21/823821 (2013.01); H01L 27/0886 (2013.01); H01L 27/0924 (2013.01); H01L 29/0847 (2013.01); H01L 29/16 (2013.01); H01L 29/401 (2013.01); H01L 29/41725 (2013.01); H01L 29/41791 (2013.01); H01L 29/665 (2013.01); H01L 29/66545 (2013.01); H01L 29/66795 (2013.01); H01L 29/161 (2013.01); H01L 29/165 (2013.01); H01L 29/7848 (2013.01);
Abstract

A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate structure, a first source/drain structure, and a contact structure. The gate structure has a gate dielectric layer over a first fin structure. The first source/drain structure is positioned in the first fin structure and adjacent to the gate structure. The first source/drain structure includes a first epitaxial layer in contact with the top surface of the first fin structure and a second epitaxial layer over the first epitaxial layer and extending above a bottom surface of the gate dielectric layer. The contact structure extends into the first source/drain structure. The top surface of the first fin structure is between a top surface and a bottom surface of the first source/drain structure.


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