The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Dec. 17, 2018
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Kuan-Lin Ho, Hsinchu, TW;

Chin-Liang Chen, Kaohsiung, TW;

Wei-Ting Lin, Taipei, TW;

Yu-Chih Liu, Taipei, TW;

Shih-Yen Lin, New Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 23/16 (2006.01); H01L 21/56 (2006.01); H01L 23/367 (2006.01); H01L 23/00 (2006.01); H01L 21/683 (2006.01); H01L 25/065 (2006.01); H01L 23/36 (2006.01); H01L 23/40 (2006.01); H01L 23/42 (2006.01); H01L 21/48 (2006.01); H01L 23/34 (2006.01); H01L 23/04 (2006.01); H01L 23/373 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76251 (2013.01); H01L 21/563 (2013.01); H01L 21/6836 (2013.01); H01L 23/16 (2013.01); H01L 23/3675 (2013.01); H01L 24/29 (2013.01); H01L 24/73 (2013.01); H01L 24/83 (2013.01); H01L 24/92 (2013.01); H01L 24/97 (2013.01); H01L 25/0655 (2013.01); H01L 25/0657 (2013.01); H01L 21/4871 (2013.01); H01L 21/4882 (2013.01); H01L 23/04 (2013.01); H01L 23/34 (2013.01); H01L 23/36 (2013.01); H01L 23/3737 (2013.01); H01L 23/40 (2013.01); H01L 23/4012 (2013.01); H01L 23/42 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/17 (2013.01); H01L 24/27 (2013.01); H01L 24/32 (2013.01); H01L 24/33 (2013.01); H01L 2221/68327 (2013.01); H01L 2224/131 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16146 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/16235 (2013.01); H01L 2224/17181 (2013.01); H01L 2224/26175 (2013.01); H01L 2224/27312 (2013.01); H01L 2224/27334 (2013.01); H01L 2224/2929 (2013.01); H01L 2224/29109 (2013.01); H01L 2224/29124 (2013.01); H01L 2224/29139 (2013.01); H01L 2224/29147 (2013.01); H01L 2224/29155 (2013.01); H01L 2224/29191 (2013.01); H01L 2224/29291 (2013.01); H01L 2224/29324 (2013.01); H01L 2224/29339 (2013.01); H01L 2224/29355 (2013.01); H01L 2224/29387 (2013.01); H01L 2224/32145 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/32237 (2013.01); H01L 2224/32245 (2013.01); H01L 2224/32257 (2013.01); H01L 2224/33181 (2013.01); H01L 2224/73204 (2013.01); H01L 2224/73253 (2013.01); H01L 2224/81 (2013.01); H01L 2224/8321 (2013.01); H01L 2224/83104 (2013.01); H01L 2224/83424 (2013.01); H01L 2224/83447 (2013.01); H01L 2224/83493 (2013.01); H01L 2224/83862 (2013.01); H01L 2224/92122 (2013.01); H01L 2224/92125 (2013.01); H01L 2224/97 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06517 (2013.01); H01L 2225/06589 (2013.01); H01L 2924/0103 (2013.01); H01L 2924/01004 (2013.01); H01L 2924/0532 (2013.01); H01L 2924/05032 (2013.01); H01L 2924/0542 (2013.01); H01L 2924/05432 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/1616 (2013.01); H01L 2924/1631 (2013.01); H01L 2924/16195 (2013.01); H01L 2924/16315 (2013.01); H01L 2924/3511 (2013.01);
Abstract

A method and structure for packaging a semiconductor device are provided. In an embodiment a first substrate is bonded to a second substrate, which is bonded to a third substrate. A thermal interface material is placed on the second substrate prior to application of an underfill material. A ring can be placed on the thermal interface material, and an underfill material is dispensed between the second substrate and the third substrate. By placing the thermal interface material and ring prior to the underfill material, the underfill material cannot interfere with the interface between the thermal interface material and the second substrate, and the thermal interface material and ring can act as a physical barrier to the underfill material, thereby preventing overflow.


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