The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2020

Filed:

May. 28, 2019
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Bert Henning Freitag, Eindhoven, NL;

Sorin Lazar, Eindhoven, NL;

Stephan Kujawa, Eindhoven, NL;

Maarten Kuijper, Eindhoven, NL;

Gerard Nicolaas Anne van Veen, Eindhoven, NL;

Peter Christiaan Tiemeijer, Eindhoven, NL;

Jamie McCormack, Eindhoven, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/44 (2006.01); H01J 49/00 (2006.01); H01J 49/02 (2006.01); H01J 49/08 (2006.01);
U.S. Cl.
CPC ...
H01J 49/44 (2013.01); H01J 49/0004 (2013.01); H01J 49/0027 (2013.01); H01J 49/025 (2013.01); H01J 49/08 (2013.01);
Abstract

A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: specifically comprising:


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