The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

Oct. 18, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Kong-Beng Thei, Pao-Shan Village, TW;

Chien-Chih Chou, New Taipei, TW;

Fu-Jier Fan, Hsinchu, TW;

Hsiao-Chin Tuan, Judong County, TW;

Yi-Huan Chen, Hsin Chu, TW;

Alexander Kalnitsky, San Francisco, CA (US);

Yi-Sheng Chen, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/8238 (2006.01); H01L 29/51 (2006.01); H01L 27/092 (2006.01); H01L 27/02 (2006.01); H01L 27/04 (2006.01); H01L 21/8234 (2006.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 27/088 (2013.01); H01L 21/82345 (2013.01); H01L 21/823437 (2013.01); H01L 21/823462 (2013.01); H01L 21/823828 (2013.01); H01L 21/823857 (2013.01); H01L 27/02 (2013.01); H01L 27/0203 (2013.01); H01L 27/04 (2013.01); H01L 27/092 (2013.01); H01L 29/42364 (2013.01); H01L 29/517 (2013.01); H01L 29/66545 (2013.01); H01L 27/0922 (2013.01);
Abstract

The present disclosure relates to an integrated circuit (IC) and a method of formation. In some embodiments, a low voltage transistor device is disposed in a low voltage region defined on a substrate. The low voltage transistor device comprises a low voltage gate electrode and a first gate dielectric separating the low voltage gate electrode from the substrate. A high voltage transistor device is disposed in a high voltage region defined on the substrate. The high voltage transistor device comprises a high voltage gate electrode and a high voltage gate dielectric separating the high voltage gate electrode from the substrate. A first interlayer dielectric layer is disposed over the substrate surrounding the low voltage transistor device and the high voltage transistor device. The high voltage gate electrode is disposed on the first interlayer dielectric layer and separated from the substrate by the first interlayer dielectric layer.


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