The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Jan. 29, 2019
Applicant:
Hitachi High-technologies Corporation, Tokyo, JP;
Inventors:
Yuko Otani, Tokyo, JP;
Yohei Minekawa, Tokyo, JP;
Takashi Nobuhara, Tokyo, JP;
Nobuhiko Kanzaki, Tokyo, JP;
Takehiro Hirai, Tokyo, JP;
Miyuki Fukuda, Tokyo, JP;
Yuya Isomae, Tokyo, JP;
Kaori Yaeshima, Tokyo, JP;
Yuji Takagi, Tokyo, JP;
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/18 (2006.01); H01J 37/22 (2006.01); G06T 7/13 (2017.01); G06T 7/60 (2017.01); G02B 21/00 (2006.01); G02B 21/36 (2006.01); G06T 7/00 (2017.01); H01J 37/28 (2006.01); G06T 7/73 (2017.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G02B 21/0016 (2013.01); G02B 21/18 (2013.01); G02B 21/365 (2013.01); G02B 21/367 (2013.01); G06T 7/0004 (2013.01); G06T 7/13 (2017.01); G06T 7/60 (2013.01); G06T 7/73 (2017.01); H01J 37/28 (2013.01); G06T 2207/10056 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2482 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2817 (2013.01);
Abstract
A defect observation device detects a defect with high accuracy regardless of a defect size. One imaging configuration for observing an observation target on a sample is selected from an optical microscope, an optical microscope, and an electron microscope, and an imaging condition of the selected imaging configuration is controlled.