The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Dec. 11, 2018
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chi-Yang Yu, Taoyuan, TW;

Chin-Liang Chen, Kaohsiung, TW;

Hai-Ming Chen, Kaohsiung, TW;

Kuan-Lin Ho, Hsinchu, TW;

Yu-Min Liang, Taoyuan, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/00 (2006.01); H01L 21/56 (2006.01); H01L 23/31 (2006.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 24/11 (2013.01); H01L 21/56 (2013.01); H01L 21/563 (2013.01); H01L 21/568 (2013.01); H01L 21/6835 (2013.01); H01L 21/76802 (2013.01); H01L 21/76843 (2013.01); H01L 21/76871 (2013.01); H01L 23/3114 (2013.01); H01L 23/5226 (2013.01); H01L 23/53238 (2013.01); H01L 24/04 (2013.01); H01L 24/09 (2013.01); H01L 24/14 (2013.01); H01L 24/20 (2013.01); H01L 23/3128 (2013.01); H01L 2221/68372 (2013.01); H01L 2221/68381 (2013.01); H01L 2224/02331 (2013.01); H01L 2224/04105 (2013.01); H01L 2224/12105 (2013.01); H01L 2224/18 (2013.01); H01L 2924/1461 (2013.01); H01L 2924/15174 (2013.01); H01L 2924/18162 (2013.01); H01L 2924/3511 (2013.01); H01L 2924/35121 (2013.01);
Abstract

An integrated fan-out package includes a die, an encapsulant, a redistribution structure, a seed layer, conductive pillars, and a buffer layer. The encapsulant encapsulates the die. The redistribution structure is over the die and the encapsulant. The redistribution structure includes dielectric layers and conductive patterns. The dielectric layers are sequentially stacked and the conductive patterns are sandwiched between the dielectric layers. The seed layer and the conductive pillars are sequentially stacked over the redistribution structure. The seed layer is directly in contact with the conductive patterns closest to the conductive pillars. The buffer layer is disposed over the redistribution structure. The dielectric layer closest to the conductive pillars and the buffer layer are sandwiched between the seed layer and the conductive patterns closest to the conductive pillars. A Young's modulus of the buffer layer is higher than a Young's modulus of each of the dielectric layers of the redistribution structure.


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